Thermal stability of carbon nitride thin films
- 期刊名称Journal of Materials Research
- 作者Hellgren, Niklas; Lin, Nian; Broitman, Esteban; Serin, Virginie; Grillo, Stefano E.; Twesten, Ray; Petrov, Ivan; Colliex, Christian; Hultman, Lars; Sundgren, Jan-Eric
- 卷第16卷
- 期第11期
- 印刷ISSN0884-2914
- 电子ISSN2044-5326
- 文件大小844.98KB
- 发表时间2001-11
- DOI10.1557/jmr.2001.0440
- 页码3188-3201
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