Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window
- 作者K. Shinagawa; H. Shindo; K. Kusaba; T. Koromogawa; J. Yamamoto; M. Furukawa
- 文件大小109.94KB
- 发表时间2001
- DOI10.1143/JJAP.40.5856
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