海量图书期刊资源，随时随地畅享阅读乐趣
Fabrication of laterally driven bulk titanium devices on titanium-on-glass wafersZhang, Yiming; Li, Nannan; Yan, Bo; Feng, Xiaoyang; Hu, Jia; He, Shuwei; Hao, Yilong; Chen, Jing · Journal of Micromechanics and Microengineering · 2013