![Nonlinear amplitude evolution during spontaneous patterning of ion-bombarded Si(001)]()
Nonlinear amplitude evolution during spontaneous patterning of ion-bombarded Si(001)Erlebacher, Jonah; Aziz, Michael J.; Chason, Eric; Sinclair, Michael B.; Floro, Jerrold A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2000