![Thermal stability of carbon nitride thin films]()
Thermal stability of carbon nitride thin filmsHellgren, Niklas; Lin, Nian; Broitman, Esteban; Serin, Virginie; Grillo, Stefano E.; Twesten, Ray; Petrov, Ivan; Colliex, Christian; Hultman, Lars; Sundgren, Jan-Eric · Journal of Materials Research · 2001