![Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalyst]()
Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalystArima, Kenta; Hara, Hideyuki; Murata, Junji; Ishida, Takeshi; Okamoto, Ryota; Yagi, Keita; Sano, Yasuhisa; Mimura, Hidekazu; Yamauchi, Kazuto · Applied Physics Letters · 2007