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[IEEE 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits - singapore (2008.07.7-2008.07.11)] 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Reliability of ZrO<inf>2</inf>/GeO<inf>x</inf>N<inf>y</inf> stacked high-k dielectrics on Ge under dynamic and pulsed voltage stress

[IEEE 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits - singapore (2008.07.7-2008.07.11)] 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Reliability of ZrO2/GeOxNy stacked high-k dielectrics on Ge under dynamic and pulsed voltage stress

Mahata, C.; Bera, M. K.; Bose, P.K.; Chakraborty, A.; SenGupta, M.; Maiti, C. K.
  • 作者Mahata, C.; Bera, M. K.; Bose, P.K.; Chakraborty, A.; SenGupta, M.; Maiti, C. K.
  • 文件大小315.92KB
  • 发表时间2008
  • DOI10.1109/ipfa.2008.4588188
  • 页码1-4
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