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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] MEMS, MOEMS, and Micromachining III - Magnetic actuated FR4 scanners for compact spectrometers

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] MEMS, MOEMS, and Micromachining III - Magnetic actuated FR4 scanners for compact spectrometers

Ataman, Çağlar; Urey, Hakan; Urey, Hakan
  • 作者Ataman, Çağlar; Urey, Hakan; Urey, Hakan
  • 卷第6993卷
  • 印刷ISSN0277-786X
  • 文件大小317.36KB
  • 发表时间2008
  • DOI10.1117/12.785375
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