![Wet etch process for patterning insulators suitable for epitaxial high Tc superconducting thin film multilevel electronic circuits]()
Wet etch process for patterning insulators suitable for epitaxial high Tc superconducting thin film multilevel electronic circuitsEidelloth, W.; Gallagher, W. J.; Robertazzi, R. P.; Koch, R. H.; Oh, B.; Sandstrom, R. L. · Applied Physics Letters · 1991