![Three-dimensional imaging of individual hafnium atoms inside a semiconductor device]()
Three-dimensional imaging of individual hafnium atoms inside a semiconductor devicevan Benthem, Klaus; Lupini, Andrew R.; Kim, Miyoung; Baik, Hion Suck; Doh, SeokJoo; Lee, Jong-Ho; Oxley, Mark P.; Findlay, Scott D.; Allen, Leslie J.; Luck, Julia T.; Pennycook, Stephen J. · Applied Physics Letters · 2005