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Chemical challenge of submicron oxide etchingS. C. Mcnevin · 1997
Contact etch scaling with contact dimensionMcNevin, S. C. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1998
Bias voltage diagnostics during oxide etch in Drytek 384TS. C. Mcnevin · 1993
The correlation between selective oxide etching and thermodynamic predictionS. C. Mcnevin · 1995
Oscillating Chemical Instabilities in Contact Etching Diagnosed by Optical EmissionS. C. Mcnevin · 1997
Rare gas ion-enhanced etching of InP by Cl2S. C. Mcnevin · 1986
Diagnosing SiO[sub 2] contact etch stop with optical emissionMcNevin, S. C. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1997
SiO2/Si etching with CHF3 in a high-field magnetronMcNevin, S. C. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1992
Charge transport in magnetronsRossnagel, S. M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1987
Biomolecules and surfacesRatner, Buddy D. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1990
Studies in differential chargingBarr, Tery L. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1989
Material selection for hard coatingsHolleck, H. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1986
Hollow cathode magnetronWang, Zhehui; Cohen, Samuel A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1999
Nanostructured materials for supercapacitorsMeyyappan, M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2013
Design of functional coatingsHegemann, D.; Oehr, C.; Fischer, A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2005
Depth profile optimizationNaumkin, A. V. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1994