The study of optimal oxidation time and different temperatures for high quality VO2 thin film based on the sputtering oxidation coupling method
- 作者Xiaofeng Xu; Xinfeng He; Gang Wang; Xiaolong Yuan; Xingxing Liu; Haiyan Huang; Sheng Yao; Huaizhong Xing; Xiaoshuang Chen; Junhao Chu
- 卷第257卷
- 期第21期
- 印刷ISSN0169-4332
- 文件大小555.46KB
- 发表时间2011
- DOI10.1016/j.apsusc.2011.04.068
- 页码8824-8827
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