![[IEEE 2008 Winter Simulation Conference (WSC) - Miami, FL, USA (2008.12.7-2008.12.10)] 2008 Winter Simulation Conference - Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities]()
[IEEE 2008 Winter Simulation Conference (WSC) - Miami, FL, USA (2008.12.7-2008.12.10)] 2008 Winter Simulation Conference - Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilitiesZimmermann, Jens; Mason, Scott J.; Fowler, John W.; Monch, Lars · 2008