![[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Oulu, Finland (Aug. 1-4, 2005)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion]()
[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Oulu, Finland (Aug. 1-4, 2005)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motionTodd, S.T.; Ankur Jain, ; Hongwei Qu, ; Huikai Xie, · 2005