![[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Wafer-level processing for polymer-based planar micro cryogenic coolers]()
[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Wafer-level processing for polymer-based planar micro cryogenic coolersWang, Y. D.; Lewis, R.; Lin, M.-H.; Radebaugh, R.; Lee, Y. C. · 2012