![SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - Recent progress in understanding the imaging and metrology using the helium ion microscope]()
SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - Recent progress in understanding the imaging and metrology using the helium ion microscopePostek, Michael T.; Postek, Michael T.; Vladar, Andras E.; Newbury, Dale E.; Platek, S. Frank; Ming, Bin; Joy, David C. · 2009