Temperature Effect on the Sensitivity of a Highly Sensitive Micro-Machined Displacement Sensor
- 期刊名称Advanced Materials Research
- 作者Mukherjee, Tania; Bhattacharyya, Tarun K.
- 电子ISSN1662-8985
- 文件大小335.35KB
- 发表时间2012-12
- DOI10.4028/www.scientific.net/AMR.622-623.1396
- 页码1396-1400
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