![Low-temperature chemical vapor deposition processes and dielectrics for microelectronic circuit manufacturing at IBM]()
Low-temperature chemical vapor deposition processes and dielectrics for microelectronic circuit manufacturing at IBMCote, D. R.; Nguyen, S. V.; Cote, W. J.; Pennington, S. L.; Stamper, A. K.; Podlesnik, D. V. · IBM Journal of Research and Development · 1995