![Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping]()
Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and dopingWeinreich, Wenke; Wilde, Lutz; Müller, Johannes; Sundqvist, Jonas; Erben, Elke; Heitmann, Johannes; Lemberger, Martin; Bauer, Anton J. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2013