![[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - A self-aligned silicide technology with the Mo/Ti bilayer system]()
[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - A self-aligned silicide technology with the Mo/Ti bilayer systemKaplan, W.; Mouroux, A.; Zhang, S.L. · 1998