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Thermal transport and thermal stress in a molybdenum film–glass substrate systemMiao, Tingting; Ma, Weigang; Yan, Shen; Zhang, Xing; Kohno, Masamichi; Takata, Yasuyuki; Ikoma, Yoshifumi · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena · 2016