Effects of an additional magnetic field in ITO thin film deposition by magnetron sputtering

• 期刊名称Ceramics International
• 作者Chan Heo, Kyong; Sohn, Youngku; Seog Gwag, Jin
• 卷第41卷
• 期第1期
• 印刷ISSN0272-8842
• 文件大小1362.19KB
• 发表时间2015-01
• DOI10.1016/j.ceramint.2014.08.111
• 页码617-621