![[IEEE Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (2005.10.25-2005.10.28)] Digest of Papers Microprocesses and Nanotechnology 2005 - Emission characteristics of silicon field emitter arrays as space charge and wafer charging neutralizer in ion implanter]()
[IEEE Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (2005.10.25-2005.10.28)] Digest of Papers Microprocesses and Nanotechnology 2005 - Emission characteristics of silicon field emitter arrays as space charge and wafer charging neutralizer in ion implanterKojima, T.; Nakamura, K.; Gotoh, Y.; Nagao, M.; Tsuji, H.; Ishikawa, J.; Ikejiri, T.; Sakai, S.; Umisedo, S.; Nagai, N. · 2005