![Toward a better understanding of the nanoscale degradation mechanisms of ultra-thin Si02∕Si films: Investigation of the best experimental conditions with a conductive-atomic force microscope]()
Toward a better understanding of the nanoscale degradation mechanisms of ultra-thin Si02∕Si films: Investigation of the best experimental conditions with a conductive-atomic force microscopeArinero, R.; Hourani, W.; Touboul, A. D.; Gautier, B.; Ramonda, M.; Albertini, D.; Militaru, L.; Gonzalez-Velo, Y.; Guasch, C.; Saigné, F. · Journal of Applied Physics · 2011