[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || EUV Free-Electron Laser Requirements for Semiconductor Manufacturing
- 作者Kawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki
- 文件大小319.07KB
- 发表时间2018
- DOI10.1007/978-3-319-73025-7_52
- 页码351-359
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || Plasma Dynamics in Capillary DischargesKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || DAGON: A 3D Maxwell–Bloch CodeKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || HHG Beam Wavefront Characterization at 30 nmKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || Characterization of Partially Coherent Ultrashort XUV PulsesKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || Coherent Diffraction Imaging with Tabletop XUV SourcesKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || EUV Free-Electron Laser Requirements for Semiconductor ManufacturingKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || MHD Simulation of Various Cross-Section Capillary DischargesKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018
[Springer Proceedings in Physics] X-Ray Lasers 2016 Volume 202 || Multilayer Mirrors for Focusing Objective in 40-nm Wavelength RegionKawachi, Tetsuya; Bulanov, Sergei V.; Daido, Hiroyuki; Kato, Yoshiaki · 2018