![Texture and Surface Morphology Effects on Tetragonal Phase Stabilization in ZrO<SUB>2</SUB> Films Deposited by Metal-Organic Chemical Vapor Deposition]()
Texture and Surface Morphology Effects on Tetragonal Phase Stabilization in ZrO<SUB>2</SUB> Films Deposited by Metal-Organic Chemical Vapor DepositionChen, Zhe; Prud'homme, Nathalie; Wang, Bin; Ribot, Patrick; Ji, Vincent · Journal of Nanoscience and Nanotechnology · 2011