![Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope]()
Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron MicroscopeAmari, H; Lari, L; Zhang, H Y; Geelhaar, L; Chèze, C; Kappers, M J; McAleese, C; Humphreys, C J; Walther, T · Journal of Physics: Conference Series · 2011