Possibility of Metal Surface Cleaning by Electron Cyclotron Resonance Plasma of Hydrogen
- 期刊名称Japanese Journal of Applied Physics
- 作者Sakamoto, Yuichi; Ishibe, Yukio
- 卷第18卷
- 期第2期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小190.04KB
- 发表时间1979-2
- DOI10.1143/JJAP.18.385
- 页码385-386
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