![[IEEE 2014 IEEE 64th Electronic Components and Technology Conference (ECTC) - Orlando, FL, USA (2014.5.27-2014.5.30)] 2014 IEEE 64th Electronic Components and Technology Conference (ECTC) - Effect of thermal annealing on TSV Cu protrusion and local stress]()
[IEEE 2014 IEEE 64th Electronic Components and Technology Conference (ECTC) - Orlando, FL, USA (2014.5.27-2014.5.30)] 2014 IEEE 64th Electronic Components and Technology Conference (ECTC) - Effect of thermal annealing on TSV Cu protrusion and local stressJing, Xiangmeng; He, Hongwen; Ji, Liang; Xu, Cheng; Xue, Kai; Su, Meiying; Song, Chongshen; Yu, Daquan; Cao, Liqiang; Zhang, Wenqi; Shangguan, Dongkai · 2014