![SPIE Proceedings [SPIE 1988 Semiconductor Symposium - Newport Beach, CA (Monday 14 March 1988)] Advanced Processing of Semiconductor Devices II - <title>Comparison Of Defects In GaAs Epilayers Grown On Si by MBE and OMCVD: As-Grown And After Rapid Thermal Annealing (RTA)</title>]()
SPIE Proceedings [SPIE 1988 Semiconductor Symposium - Newport Beach, CA (Monday 14 March 1988)] Advanced Processing of Semiconductor Devices II - <title>Comparison Of Defects In GaAs Epilayers Grown On Si by MBE and OMCVD: As-Grown And After Rapid Thermal Annealing (RTA)</title>Sharan, S.; Narayan, J.; Lee, J. W.; Fan, J. C. C.; Craighead, Harold G.; Narayan, Jagdish · 1988