![SPIE Proceedings [SPIE 16th International Workshop on Physics of Semiconductor Devices - Kanpur, India (Monday 19 December 2011)] 16th International Workshop on Physics of Semiconductor Devices - MEMS deformable mirrors: technology and applications]()
SPIE Proceedings [SPIE 16th International Workshop on Physics of Semiconductor Devices - Kanpur, India (Monday 19 December 2011)] 16th International Workshop on Physics of Semiconductor Devices - MEMS deformable mirrors: technology and applicationsGupta, Amita; Singh, R.; Chaudhary, Monika; Kumar, Shailesh; Meena, A. K.; Katiyar, Monica; Mazhari, B.; Mohapatra, Y N. · 2012