![Microscopic Structure of Directly Bonded Silicon Substrates]()
Microscopic Structure of Directly Bonded Silicon SubstratesKato, Tetsuji; Ohara, Yuji; Ueda, Takaya; Kikkawa, Jun; Nakamura, Yoshiaki; Sakai, Akira; Nakatsuka, Osamu; Ogawa, Masaki; Zaima, Shigeaki; Toyoda, Eiji; Isogai, Hiromichi; Senda, Takeshi; Izunome, Kouji; Tajiri, Hiroo; Sakata, Osamu; Kimura, Shigeru · Key Engineering Materials · 2011