The role of the negatively charged (Si3−Si−F2)−complexes in interactions of fluorine with the (111) surface of silicon
- 作者M. R. Baklanov; A. A. Karpushin; K. P. Moginikov; A. N. Sorokin
- 卷第37卷
- 期第1期
- 印刷ISSN0022-4766
- 电子ISSN1573-8779
- 文件大小435.59KB
- 发表时间1996-0102
- DOI10.1007/bf02578566
- 页码11-17
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