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Inductively coupled plasmas in low global-warming-potential gasesA. N. Goyette; Y. Wang; J. K. Olthoff · 2000
Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactorM. A. Sobolewski; J. K. Olthoff; Y. Wang · 1999
Ion fluxes and energies in inductively coupled radio-frequency discharges containing C[sub 2]F[sub 6] and c-C[sub 4]F[sub 8]A. N. Goyette; Y. Wang; M. Misakian; J. K. Olthoff · 2000