Probing Stress State and Phase Content in Ultra-Thin Ta Films
- 期刊名称MRS Proceedings
- 作者Whitacre, J. F.; Rek, Z. U.; Yalisove, S. M.; Bilello, J. C.
- 卷第524卷
- 电子ISSN1946-4274
- 文件大小917.47KB
- 发表时间1998-1
- DOI10.1557/proc-524-115
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