Comparison of Ultra-low-energy Ion Implantation of Boron and BF2
- 期刊名称MRS Proceedings
- 作者Park, Jihwan; Hwang, Hyunsang
- 卷第568卷
- 电子ISSN1946-4274
- 文件大小272.13KB
- 发表时间1999-1
- DOI10.1557/proc-568-71
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