![[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Low actuation voltage totally free flexible RF MEMS switch with antistiction system]()
[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Low actuation voltage totally free flexible RF MEMS switch with antistiction systemTouati, S.; Lorphelin, N.; Kanciurzewski, A.; Robin, R.; Rollier, A.-S.; Millet, O.; Segueni, K. · 2008