![SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Nanotechnology - Are we there yet? Looking beyond the end of scaling in the Nanometer Era]()
SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Nanotechnology - Are we there yet? Looking beyond the end of scaling in the Nanometer EraTiwari, Sandip; Vajtai, Robert; Aymerich, Xavier; Avci, Uygar E.; Liu, C. C.; Kish, Laszlo B.; Rubio, Angel; Xue, Lei; Kumar, Arvind; Kim, Sang K.; Silva, Helena G. · 2003