![Tribological properties of nitrogen-containing amorphous carbon film produced by dc plasma chemical vapor deposition]()
Tribological properties of nitrogen-containing amorphous carbon film produced by dc plasma chemical vapor depositionZhang, Wei; Wazumi, Koichiro; Tanaka, Akihiro; Koga, Yoshinori · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2003