![Physical and Electrical Characteristics of F- and C-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides]()
Physical and Electrical Characteristics of F- and C-Doped Low Dielectric Constant Chemical Vapor Deposited OxidesWu, Zhen-Cheng; Shiung, Zhi-Wen; Chiang, Chiu-Chih; Wu, Wei-Hao; Chen, Mao-Chieh; Jeng, Shwang-Ming; Chang, Weng; Chou, Pei-Fen; Jang, Syun-Ming; Yu, Chen-Hua; Liang, Mong-Song · Journal of The Electrochemical Society · 2001