Investigation of the implanted phosphorus in a boron doped SiGe epitaxial layer
- 作者R. Kinder; A. Vincze; M. Kuruc; R. Srnánek; B. Lojek; B. Sopko; D. Chren
- 卷第37卷
- 期第7期
- 印刷ISSN0026-2692
- 文件大小159.20KB
- 发表时间2006
- DOI10.1016/j.mejo.2005.07.010
- 页码642-645
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