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Improvement of the electrical properties of PECVD silicon oxide using high-density and low-ion-energy plasma post-treatmentChuan Jie Zhong; Hiroaki Tanaka; Shigetoshi Sugawa; Tadahiro Ohmi · 2005
Effect of power density on the structure properties of microcrystalline silicon film prepared by high-density low-ion-energy microwave plasmaChuan Jie Zhong; Hiroaki Tanaka; Shigetoshi Sugawa; Tadahiro Ohmi · 2005