![[IEEE 2010 International Conference on Microwave and Millimeter Wave Technology (ICMMT) - Chengdu, China (2010.05.8-2010.05.11)] 2010 International Conference on Microwave and Millimeter Wave Technology - Research on Si-based MEMS process in development 3D millimeter-wave multi-chip module package]()
[IEEE 2010 International Conference on Microwave and Millimeter Wave Technology (ICMMT) - Chengdu, China (2010.05.8-2010.05.11)] 2010 International Conference on Microwave and Millimeter Wave Technology - Research on Si-based MEMS process in development 3D millimeter-wave multi-chip module packageWu, Liang; Wang, Huajiang; Tang, Jiajie; Qian, Rong; Hou, Yang; Wang, Wei; Hao, Sun; Li, Lingyun; Sun, Xiaowei; Luo, Le · 2010