![SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - <title>Experimental validation of 20nm sensitivity of singular beam microscopy</title>]()
SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - <title>Experimental validation of 20nm sensitivity of singular beam microscopy</title>Spektor, Boris; Normatov, Alexander; Shamir, Joseph; Osten, Wolfgang; Gorecki, Christophe; Novak, Erik L. · 2007