![Studying electro‐physical material characteristics of vacuum‐deposited layers of aluminium (tantalum) when using aluminium sheet as a carrier for MCM, interconnections, vias and resistive groups]()
Studying electro‐physical material characteristics of vacuum‐deposited layers of aluminium (tantalum) when using aluminium sheet as a carrier for MCM, interconnections, vias and resistive groupsPhilippov, Ph.; Arnaudov, R.; Yordanov, N.; Ianev, V.; Gospodinova, M. · Microelectronics International · 1998