Chemically Amplified, Positive Tone, Polynorbornene Dielectric for Microelectronics Packaging
- 期刊名称ECS Journal of Solid State Science and Technology
- 作者Mueller, B. K.; Schwartz, J. M.; Sutlief, A. E.; Bell, W. K.; Hayes, C. O.; Elce, E.; Grant Willson, C.; Kohl, P. A.
- 卷第4卷
- 期第1期
- 印刷ISSN2162-8769
- 电子ISSN2162-8777
- 文件大小848.75KB
- 发表时间2014-08-04
- DOI10.1149/2.0011501jss
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