![[IEEE 2017 IEEE 30th International Conference on Microelectronics (MIEL) - Nis (2017.10.9-2017.10.11)] 2017 IEEE 30th International Conference on Microelectronics (MIEL) - Evaluation of the mechanical and tribological properties of multilayer CrN/TiN films deposited at low temperatures]()
[IEEE 2017 IEEE 30th International Conference on Microelectronics (MIEL) - Nis (2017.10.9-2017.10.11)] 2017 IEEE 30th International Conference on Microelectronics (MIEL) - Evaluation of the mechanical and tribological properties of multilayer CrN/TiN films deposited at low temperaturesKolaklieva, L.; Rabadzhiyska, S.; Kakanakov, R.; Chitanov, V.; Cholakova, T.; Rupetchov, V.; Mishev, G. · 2017