![SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 13 February 2016)] Optical Interconnects XVI - Bimorph actuators in thick SiO
<sub/>2</sub>
for photonic alignment]()
SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 13 February 2016)] Optical Interconnects XVI - Bimorph actuators in thick SiO
<sub/>2</sub>
for photonic alignmentSchröder, Henning; Chen, Ray T.; Wu, Kai; Peters, Tjitte-Jelte; Tichem, Marcel; Postma, Ferry; Prak, Albert; Wörhoff, Kerstin; Leinse, Arne · 2016