![Benefits of energetic ion bombardment for tailoring stress and microstructural evolution during growth of Cu thin films]()
Benefits of energetic ion bombardment for tailoring stress and microstructural evolution during growth of Cu thin filmsCemin, Felipe; Abadias, Gregory; Minea, Tiberiu; Furgeaud, Clarisse; Brisset, François; Solas, Denis; Lundin, Daniel · Acta Materialia · 2017