![[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators]()
[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonatorsPiazza, G.; Stephanou, P.J.; Wijesundara, M.B.J.; Pisano, A.P. · 2005